In this work we have created and commissioned a Monte Carlo model of 6FFF Varian TrueBeam linear accelerator using BEAMnrc. For this purpose we have experimentally measured the focal spot size and shape of three Varian TrueBeam treatment units in 6FFF modality with a slit collimator and several depth dose and lateral beam profiles in a water phantom. The Monte Carlo model of a 6FFF TrueBeam machine was implemented with a primary electron source commissioned as a 2D Gaussian with Full Width Half Maximum selected by comparison of simulated and measured narrow beam profiles. The energy of the primary electron beam was optimized through a simultaneous fit to the measured beam depth dose profiles. Special attention was paid to evaluation of uncertainties of the selected Monte Carlo source parameters. These uncertainties were calculated by analysing the sensitivity of the commissioning process to changes in both primary beam size and energy. Both experimental and Monte Carlo commissioned focus size values were compared and found to be in excellent agreement. The commissioned Monte Carlo model reproduces within 1% accuracy the dose distributions of radiation field size from 3 cm × 3 cm to 15 cm × 15 cm.