Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators.


School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China. [Email]


This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.


Silicon-Aluminum Nitride (Si-AlN) Micro-Electro-Mechanical-Systems (MEMS) resonator,anchor loss,bandgap,high quality factor,phononic crystal,

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